JPH03112941U - - Google Patents
Info
- Publication number
- JPH03112941U JPH03112941U JP2238590U JP2238590U JPH03112941U JP H03112941 U JPH03112941 U JP H03112941U JP 2238590 U JP2238590 U JP 2238590U JP 2238590 U JP2238590 U JP 2238590U JP H03112941 U JPH03112941 U JP H03112941U
- Authority
- JP
- Japan
- Prior art keywords
- frame
- groove
- cassette
- wafers
- view
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 235000012431 wafers Nutrition 0.000 claims 4
- 239000002390 adhesive tape Substances 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 230000002093 peripheral effect Effects 0.000 claims 1
- 230000000630 rising effect Effects 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2238590U JP2509202Y2 (ja) | 1990-03-05 | 1990-03-05 | ウエハ貼付用フレ―ム |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2238590U JP2509202Y2 (ja) | 1990-03-05 | 1990-03-05 | ウエハ貼付用フレ―ム |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03112941U true JPH03112941U (en]) | 1991-11-19 |
| JP2509202Y2 JP2509202Y2 (ja) | 1996-08-28 |
Family
ID=31525393
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2238590U Expired - Lifetime JP2509202Y2 (ja) | 1990-03-05 | 1990-03-05 | ウエハ貼付用フレ―ム |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2509202Y2 (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010251356A (ja) * | 2009-04-10 | 2010-11-04 | Disco Abrasive Syst Ltd | 加工装置 |
-
1990
- 1990-03-05 JP JP2238590U patent/JP2509202Y2/ja not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010251356A (ja) * | 2009-04-10 | 2010-11-04 | Disco Abrasive Syst Ltd | 加工装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2509202Y2 (ja) | 1996-08-28 |